Titanium Tube Target

Titanium tube target made of titanium element Symbol Ti, atomic number 22, density 4.454g/Cm3, physical properties: melting point 1668C℃, boiling point 3262° C, specific heat capacity 0.52 (J/(Kg·K), evaporation heat 421 (KJ/Mol), melting heat 15.45(KJ/Mol),  Conductivity 0.0234(106/Cm).  

Due to the high cost of high purity titanium, the application field of titanium tube target is extremely limited, mainly used as semiconductor materials and suction materials in ultra-high vacuum devices.  

High purity titanium has the ability to absorb hydrogen, CH4 and Co2 gases, so it can be widely used in high vacuum and ultra-high vacuum systems.  When making LSI, VLSI and ULSI circuit network by sputtering the high purity titanium produced by Zhongkano can make these integrated parts extremely light, thin, small size and dense circuit.  High purity titanium tube targets can also be used as barrier metal materials.  

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